Although flow charts can be used to explain just about anything, most people use them for one of three reasons: to inform decisions, show processes or to visualize data—which is why most flow chart ...

Multiple patterning lithography decomposition (MPLD) and mask optimization enable the ever-shrinking device feature sizes far below the lithography system limit. Conventional MPLD is solved by ...

In this article, we explore rule-free layout decomposition following a simple but sweet principle, let the mask optimizer “teach” the layout decomposer how to generate suitable decompositions. Our ...