Although all of the AO example applications described so far have used MEMS DMs to correct for intrinsic aberrations in the optical beam path of an imaging instrument (atmospheric turbulence ...

MEMS Optical, Inc. designs and fabricates micro optics such as diffraction gratings, microlens arrays, beamsplitters, diffusers, and beam shapers and also designs and fabricates electro optical ...

Paul Bergstrom’s research interests include the integration of microelectromechanical (MEMS) elements with microelectronics processing ... by Bergstrom’s research group, utilizing beam-based ...