Curiosity about a mistake that left tiny dots on a germanium wafer with evaporated metal films led to the discovery of ...

Over the course of 24–48 hours, a chemical reaction catalyzed by the metal film etched remarkable patterns on the germanium surface. Investigation of the process revealed that the chromium and ...

Hundreds of regular patterns spontaneously emerge on a small germanium chip. A curiosity about tiny dots on a germanium wafer with metal films led to the discovery of intricate spiral patterns etched ...

You have extreme uniformity, and you don’t have to remove the entire film,” said Dan Hutcheson, vice chairman of TechInsights. “With selective etch, you are hammering away at the film until it’s all ...

The reactors in the group currently include: 5 Hot wall viscous flow reactors equipped with an in situ quartz crystal microbalance (QCM) to monitor film growth and etching. One of these reactors can ...

The PECVD process modules are mainly developed to produce outstanding uniformity and high-rate films, with control of film properties, such as electrical characteristics, refractive index, stress, and ...