Over the course of 24–48 hours, a chemical reaction catalyzed by the metal film etched remarkable patterns on the germanium surface. Investigation of the process revealed that the chromium and ...

Hundreds of regular patterns spontaneously emerge on a small germanium chip. A curiosity about tiny dots on a germanium wafer with metal films led to the discovery of intricate spiral patterns etched ...

The reactors in the group currently include: 5 Hot wall viscous flow reactors equipped with an in situ quartz crystal microbalance (QCM) to monitor film growth and etching. One of these reactors can ...

The PECVD process modules are mainly developed to produce outstanding uniformity and high-rate films, with control of film properties, such as electrical characteristics, refractive index, stress, and ...